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Correlation between solvent diffusion, porosity and pore sealing for low k dielectrics
Publication:
Correlation between solvent diffusion, porosity and pore sealing for low k dielectrics
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Date
2004
Proceedings Paper
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8977.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Abell, Thomas
;
Shamiryan, Denis
;
Patz, Matthias
;
Maex, Karen
Journal
Abstract
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1949
since deposited on 2021-10-15
Acq. date: 2026-01-06
Citations
Metrics
Views
1949
since deposited on 2021-10-15
Acq. date: 2026-01-06
Citations