Publication:
The importance of moisture control for EOT scaling of Hf-based dielectrics
Date
Loading...
Journal
Abstract
Description
Statistics
Views
1933 since deposited on 2021-10-18
3last month
2last week
Acq. date: 2026-08-09
Citations
Statistics
Views
1933 since deposited on 2021-10-18
3last month
2last week
Acq. date: 2026-08-09
Citations