The importance of moisture control for EOT scaling of Hf-based dielectrics

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Author(s)

Ragnarsson, Lars-Ake

;

;

Yamamoto, Kazuhiko

;

;

Pourtois, Geoffrey

;

Delabie, Annelies

;

Parmentier, Brigitte

;

Conard, Thierry

;

Roussel, Philippe

;

De Gendt, Stefan

;

Journal

Journal of the Electrochemical Society

Metrics

1925 since deposited on 2021-10-18

Acq. date: 2025-10-23