Publication:
Germanium content dependence of the leakage current of recessed SiGe source/drain junctions
Date
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.orcid | 0000-0002-5218-4046 | |
| cris.virtual.orcid | 0000-0002-8245-9442 | |
| cris.virtual.orcid | 0000-0002-5849-3384 | |
| cris.virtual.orcid | 0000-0003-3513-6058 | |
| cris.virtualsource.department | 715a9ada-0798-46d2-a8ca-4775db9a8e46 | |
| cris.virtualsource.department | f421472b-3c78-4486-a88e-266fc55314cb | |
| cris.virtualsource.department | db73cf2d-2000-429c-bc92-553a1ef3e876 | |
| cris.virtualsource.department | 2d7dd015-fa43-4fbb-89fc-68f144075506 | |
| cris.virtualsource.orcid | 715a9ada-0798-46d2-a8ca-4775db9a8e46 | |
| cris.virtualsource.orcid | f421472b-3c78-4486-a88e-266fc55314cb | |
| cris.virtualsource.orcid | db73cf2d-2000-429c-bc92-553a1ef3e876 | |
| cris.virtualsource.orcid | 2d7dd015-fa43-4fbb-89fc-68f144075506 | |
| dc.contributor.author | Simoen, Eddy | |
| dc.contributor.author | Bargallo Gonzalez, Mireia | |
| dc.contributor.author | Eneman, Geert | |
| dc.contributor.author | Verheyen, Peter | |
| dc.contributor.author | Benedetti, Alessandro | |
| dc.contributor.author | Bender, Hugo | |
| dc.contributor.author | Loo, Roger | |
| dc.contributor.author | Claeys, Cor | |
| dc.contributor.imecauthor | Simoen, Eddy | |
| dc.contributor.imecauthor | Eneman, Geert | |
| dc.contributor.imecauthor | Verheyen, Peter | |
| dc.contributor.imecauthor | Bender, Hugo | |
| dc.contributor.imecauthor | Loo, Roger | |
| dc.contributor.orcidimec | Simoen, Eddy::0000-0002-5218-4046 | |
| dc.contributor.orcidimec | Eneman, Geert::0000-0002-5849-3384 | |
| dc.contributor.orcidimec | Loo, Roger::0000-0003-3513-6058 | |
| dc.date.accessioned | 2021-10-16T19:43:30Z | |
| dc.date.available | 2021-10-16T19:43:30Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 2007 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/12898 | |
| dc.source.beginpage | 787 | |
| dc.source.endpage | 791 | |
| dc.source.issue | 7 | |
| dc.source.journal | Journal of Materials Science: Materials in Electronics | |
| dc.source.volume | 18 | |
| dc.title | Germanium content dependence of the leakage current of recessed SiGe source/drain junctions | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | Original bundle
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| Publication available in collections: |