Publication:

Transmission electron diffraction techniques for nm scale strain measurements in semiconductors

Date

1996
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorVanhellemont, Jan
dc.contributor.authorJanssens, Koenraad
dc.contributor.authorFrabboni, S.
dc.contributor.authorSmeys, Peter
dc.contributor.authorBalboni, R.
dc.contributor.authorArmigliato, A.
dc.date.accessioned2021-09-29T15:44:25Z
dc.date.available2021-09-29T15:44:25Z
dc.date.embargo9999-12-31
dc.date.issued1996
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1609
dc.source.beginpage435
dc.source.conferenceSurface/Interface and stress Effects in Electronic Material Nanostructures
dc.source.conferencedate27/11/1995
dc.source.conferencelocationBoston, MA USA
dc.source.endpage446
dc.title

Transmission electron diffraction techniques for nm scale strain measurements in semiconductors

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
1584.pdf
Size:
532.35 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions