Publication:

Characterisation of mechanical stress in advanced PBL isolation

Date

1994
Proceedings Paper
Simple item page Full metadata Statistics
 
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.orcid0000-0003-3822-5953
cris.virtualsource.department99f46578-0b77-4a3f-b8e5-a6879cd2ea9a
cris.virtualsource.orcid99f46578-0b77-4a3f-b8e5-a6879cd2ea9a
dc.contributor.authorJones, S. K.
dc.contributor.authorAhmed, M.
dc.contributor.authorRothwell, W. J.
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorDeferm, Ludo
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorDeferm, Ludo
dc.date.accessioned2021-09-29T12:42:33Z
dc.date.available2021-09-29T12:42:33Z
dc.date.embargo9999-12-31
dc.date.issued1994
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/210
dc.source.beginpage255
dc.source.conference24th European Solid State Device Research Conference - ESSDERC
dc.source.conferencedate11/09/1994
dc.source.conferencelocationEdinburgh UK
dc.source.endpage258
dc.title

Characterisation of mechanical stress in advanced PBL isolation

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
202.pdf
Size:
767.73 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions