Publication:

ALD Ru and its applications in DRAM MIM-capacitors and interconnect

Date

2011
Proceedings Paper
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cris.virtual.orcid0000-0001-7547-7194
cris.virtual.orcid0000-0003-3545-3424
cris.virtual.orcid0000-0002-1496-7816
cris.virtualsource.department5afcb429-ac38-4c13-8422-3088287ba9bd
cris.virtualsource.department5345513e-14d5-47e9-a494-1dda4ed18864
cris.virtualsource.departmentaaff356e-f29a-4bfd-adc0-d83d61338c4b
cris.virtualsource.orcid5afcb429-ac38-4c13-8422-3088287ba9bd
cris.virtualsource.orcid5345513e-14d5-47e9-a494-1dda4ed18864
cris.virtualsource.orcidaaff356e-f29a-4bfd-adc0-d83d61338c4b
dc.contributor.authorSchaekers, Marc
dc.contributor.authorSwerts, Johan
dc.contributor.authorAltimime, Laith
dc.contributor.authorTokei, Zsolt
dc.contributor.imecauthorSchaekers, Marc
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecSchaekers, Marc::0000-0002-1496-7816
dc.date.accessioned2021-10-19T18:30:58Z
dc.date.available2021-10-19T18:30:58Z
dc.date.embargo9999-12-31
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19740
dc.source.beginpage509
dc.source.conferenceChina Semiconductor Technology International Conference - CSTIC
dc.source.conferencedate13/03/2011
dc.source.conferencelocationShanghai China
dc.source.endpage514
dc.title

ALD Ru and its applications in DRAM MIM-capacitors and interconnect

dc.typeProceedings paper
dspace.entity.typePublication
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