Publication:
Stability of silicon germanium stressors
Date
| dc.contributor.author | Tomasini, Pierre | |
| dc.contributor.author | Machkaoutsan, Vladimir | |
| dc.contributor.author | Thomas, Shawn | |
| dc.contributor.author | Loo, Roger | |
| dc.contributor.author | Caymax, Matty | |
| dc.contributor.author | Verheyen, Peter | |
| dc.contributor.imecauthor | Machkaoutsan, Vladimir | |
| dc.contributor.imecauthor | Loo, Roger | |
| dc.contributor.imecauthor | Caymax, Matty | |
| dc.contributor.imecauthor | Verheyen, Peter | |
| dc.contributor.orcidimec | Loo, Roger::0000-0003-3513-6058 | |
| dc.date.accessioned | 2021-10-18T22:24:32Z | |
| dc.date.available | 2021-10-18T22:24:32Z | |
| dc.date.issued | 2010 | |
| dc.identifier.issn | 0040-6090 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/18095 | |
| dc.source.beginpage | S133 | |
| dc.source.endpage | S135 | |
| dc.source.issue | 6, Suppl. 1 | |
| dc.source.journal | Thin Solid Films | |
| dc.source.volume | 518 | |
| dc.title | Stability of silicon germanium stressors | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |