Publication:
A novel gap narrowing process for creating high aspect ratio transduction gaps for MEM HF resonators
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1924 since deposited on 2021-10-18
4last month
Acq. date: 2025-12-08
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Metrics
Views
1924 since deposited on 2021-10-18
4last month
Acq. date: 2025-12-08
Citations