Publication:

Biocompatible and Hermetic Encapsulation of PMUTs: Effects of Parylene F-VT4 and ALD Stacks on Membrane Vibration and Acoustic Performance

Date

2025-JUN 30
Journal article
https://doi.org/10.3390/s25134074
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dc.contributor.authorAfshari, Esmaeil
dc.contributor.authorHouri, Samer
dc.contributor.authorVerplancke, Rik
dc.contributor.authorRochus, Veronique
dc.contributor.authorCauwe, Maarten
dc.contributor.authorGijsenbergh, Pieter
dc.contributor.authorde Beeck, Maaike Op
dc.contributor.imecauthorAfshari, Esmaeil
dc.contributor.imecauthorHouri, Samer
dc.contributor.imecauthorVerplancke, Rik
dc.contributor.imecauthorRochus, Veronique
dc.contributor.imecauthorCauwe, Maarten
dc.contributor.imecauthorGijsenbergh, Pieter
dc.contributor.imecauthorde Beeck, Maaike Op
dc.contributor.orcidimecHouri, Samer::0000-0002-2733-1366
dc.contributor.orcidimecVerplancke, Rik::0000-0002-6642-9454
dc.contributor.orcidimecRochus, Veronique::0000-0001-9680-5724
dc.contributor.orcidimecCauwe, Maarten::0000-0002-6413-998X
dc.contributor.orcidimecGijsenbergh, Pieter::0000-0003-0135-6968
dc.date.accessioned2025-07-20T03:57:20Z
dc.date.available2025-07-20T03:57:20Z
dc.date.issued2025-JUN 30
dc.identifier.doi10.3390/s25134074
dc.identifier.pmidMEDLINE:40648330
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/45924
dc.publisherMDPI
dc.source.issue13
dc.source.journalSENSORS
dc.source.numberofpages24
dc.source.volume25
dc.subject.keywordsMICROMACHINED ULTRASONIC TRANSDUCERS
dc.subject.keywordsARRAYS
dc.subject.keywordsTECHNOLOGY
dc.title

Biocompatible and Hermetic Encapsulation of PMUTs: Effects of Parylene F-VT4 and ALD Stacks on Membrane Vibration and Acoustic Performance

dc.typeJournal article
dspace.entity.typePublication
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