Publication:
Ion beams focus on semiconductor devices
Date
| dc.contributor.author | Bender, Hugo | |
| dc.contributor.imecauthor | Bender, Hugo | |
| dc.date.accessioned | 2021-10-14T12:40:45Z | |
| dc.date.available | 2021-10-14T12:40:45Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 2000 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/4113 | |
| dc.source.beginpage | 11 | |
| dc.source.endpage | 14 | |
| dc.source.issue | March_April | |
| dc.source.journal | Vacuum Solutions | |
| dc.title | Ion beams focus on semiconductor devices | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | Original bundle
| |
| Publication available in collections: |