Publication:

Delamination in BEOL: analysis of interface failure by combined experimental & modeling approaches

Date

2013
Proceedings Paper
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dc.contributor.authorDebecker, Bjorn
dc.contributor.authorVanstreels, Kris
dc.contributor.authorGonzalez, Mario
dc.contributor.authorVandevelde, Bart
dc.contributor.imecauthorVanstreels, Kris
dc.contributor.imecauthorGonzalez, Mario
dc.contributor.imecauthorVandevelde, Bart
dc.contributor.orcidimecVanstreels, Kris::0000-0002-4420-0966
dc.contributor.orcidimecVandevelde, Bart::0000-0002-6753-6438
dc.date.accessioned2021-10-21T07:13:16Z
dc.date.available2021-10-21T07:13:16Z
dc.date.embargo9999-12-31
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22233
dc.source.beginpage5C.2
dc.source.conferenceIEEE International Reliability Physics Symposium - IRPS
dc.source.conferencedate14/04/2013
dc.source.conferencelocationMonterey, CA USA
dc.title

Delamination in BEOL: analysis of interface failure by combined experimental & modeling approaches

dc.typeProceedings paper
dspace.entity.typePublication
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