Publication:

Practicalities and limitations of scanning capacitance microscopy for routine integrated circuit characterization

Date

2000
Journal article
Simple item page Full metadata Statistics
 
dc.contributor.authorStephenson, Robert
dc.contributor.authorDe Wolf, Peter
dc.contributor.authorTrenkler, Thomas
dc.contributor.authorHantschel, Thomas
dc.contributor.authorClarysse, Trudo
dc.contributor.authorJansen, Philippe
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.date.accessioned2021-10-14T13:50:52Z
dc.date.available2021-10-14T13:50:52Z
dc.date.embargo9999-12-31
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4771
dc.source.beginpage555
dc.source.endpage559
dc.source.issue1
dc.source.journalJ. Vacuum Science and Technology B
dc.source.volumeB18
dc.title

Practicalities and limitations of scanning capacitance microscopy for routine integrated circuit characterization

dc.typeJournal article
dspace.entity.typePublication
Files

Original bundle

Name:
4772.pdf
Size:
258.33 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Articles