Publication:

Practicalities and limitations of scanning capacitance microscopy for routine integrated circuit characterization

Date

2000
Journal article
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cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.orcid#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.orcid0000-0001-9476-4084
cris.virtualsource.departmentc04a45aa-af45-4b45-b54e-dd767c676d15
cris.virtualsource.departmente754b012-c4f4-4d96-8cf4-048fae6e57b3
cris.virtualsource.orcidc04a45aa-af45-4b45-b54e-dd767c676d15
cris.virtualsource.orcide754b012-c4f4-4d96-8cf4-048fae6e57b3
dc.contributor.authorStephenson, Robert
dc.contributor.authorDe Wolf, Peter
dc.contributor.authorTrenkler, Thomas
dc.contributor.authorHantschel, Thomas
dc.contributor.authorClarysse, Trudo
dc.contributor.authorJansen, Philippe
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.date.accessioned2021-10-14T13:50:52Z
dc.date.available2021-10-14T13:50:52Z
dc.date.embargo9999-12-31
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4771
dc.source.beginpage555
dc.source.endpage559
dc.source.issue1
dc.source.journalJ. Vacuum Science and Technology B
dc.source.volumeB18
dc.title

Practicalities and limitations of scanning capacitance microscopy for routine integrated circuit characterization

dc.typeJournal article
dspace.entity.typePublication
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