Publication:
Silicon photonic microelectromechanical phase shifters for scalable programmable photonics
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Acq. date: 2026-09-14
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794 since deposited on 2021-11-27
103last month
18last week
Acq. date: 2026-09-14
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1549 since deposited on 2021-11-27
1last month
Acq. date: 2026-09-15
Citations