Publication:
Low-k1 imaging for contacts and lines using immersion ArF
Date
| dc.contributor.author | Van Bavel, Mieke | |
| dc.contributor.author | Hendrickx, Eric | |
| dc.contributor.author | Wiaux, Vincent | |
| dc.contributor.author | Vandenberghe, Geert | |
| dc.contributor.imecauthor | Van Bavel, Mieke | |
| dc.contributor.imecauthor | Hendrickx, Eric | |
| dc.contributor.imecauthor | Wiaux, Vincent | |
| dc.contributor.imecauthor | Vandenberghe, Geert | |
| dc.date.accessioned | 2021-10-16T05:52:09Z | |
| dc.date.available | 2021-10-16T05:52:09Z | |
| dc.date.issued | 2005-02 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/11345 | |
| dc.source.beginpage | 39 | |
| dc.source.endpage | 42 | |
| dc.source.issue | 2 | |
| dc.source.journal | Solid State Technology | |
| dc.source.volume | 48 | |
| dc.title | Low-k1 imaging for contacts and lines using immersion ArF | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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