Publication:

Poly SiGe, a promising material for MEMS monolithic integration with the driving electronics

Date

2002
Journal article
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dc.contributor.authorSedky, Sherif
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorBaert, Kris
dc.date.accessioned2021-10-14T23:08:10Z
dc.date.available2021-10-14T23:08:10Z
dc.date.embargo9999-12-31
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6817
dc.source.beginpage503
dc.source.endpage511
dc.source.journalSensors and Actuators A
dc.source.volume97-98
dc.title

Poly SiGe, a promising material for MEMS monolithic integration with the driving electronics

dc.typeJournal article
dspace.entity.typePublication
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