Publication:

Contact reliability improvement of a poly-SiGe based nano-relay with titanium nitride coating

Date

2015
Proceedings Paper
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cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.orcid0000-0002-6377-4199
cris.virtual.orcid0009-0005-8734-5646
cris.virtual.orcid0000-0003-4240-4962
cris.virtual.orcid#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.orcid#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtualsource.departmentfde8f386-0ddb-42e1-ad64-53cde7dda12d
cris.virtualsource.departmentcf84af95-3995-418f-8440-5a31d9b0efcf
cris.virtualsource.department33803177-7306-475d-b16e-355c4622a361
cris.virtualsource.department807d5a59-444c-4a5f-a56f-058bf05a17af
cris.virtualsource.department2e4899f6-dd27-4b8d-adf7-533ca9064170
cris.virtualsource.orcidfde8f386-0ddb-42e1-ad64-53cde7dda12d
cris.virtualsource.orcidcf84af95-3995-418f-8440-5a31d9b0efcf
cris.virtualsource.orcid33803177-7306-475d-b16e-355c4622a361
cris.virtualsource.orcid807d5a59-444c-4a5f-a56f-058bf05a17af
cris.virtualsource.orcid2e4899f6-dd27-4b8d-adf7-533ca9064170
dc.contributor.authorRamezani, Maliheh
dc.contributor.authorSeveri, Simone
dc.contributor.authorMoussa, Alain
dc.contributor.authorOsman, Haris
dc.contributor.authorTilmans, Harrie
dc.contributor.authorDe Meyer, Kristin
dc.contributor.imecauthorSeveri, Simone
dc.contributor.imecauthorMoussa, Alain
dc.contributor.imecauthorOsman, Haris
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.imecauthorDe Meyer, Kristin
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.date.accessioned2021-10-22T22:07:06Z
dc.date.available2021-10-22T22:07:06Z
dc.date.embargo9999-12-31
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25800
dc.identifier.urlhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7180989
dc.source.beginpage576
dc.source.conference18th International Conference on Solid-State Sensors, Actuators and Microsystems - TRANSDUCERS
dc.source.conferencedate21/06/2015
dc.source.conferencelocationAnchorage, AL USA
dc.source.endpage579
dc.title

Contact reliability improvement of a poly-SiGe based nano-relay with titanium nitride coating

dc.typeProceedings paper
dspace.entity.typePublication
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