Publication:

Electrostatic switching RF-MEMS devices in thin film technology

Date

2008-12
Dissertation
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cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.orcid0000-0003-0920-1709
cris.virtualsource.department48d3caed-8049-4a39-ae25-dd247b165b25
cris.virtualsource.orcid48d3caed-8049-4a39-ae25-dd247b165b25
dc.contributor.authorRottenberg, Xavier
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.thesisadvisorNauwelaers, Bart
dc.contributor.thesisadvisorMertens, Robert
dc.date.accessioned2021-10-17T10:17:28Z
dc.date.available2021-10-17T10:17:28Z
dc.date.embargo9999-12-31
dc.date.issued2008-12
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14393
dc.title

Electrostatic switching RF-MEMS devices in thin film technology

dc.typePHD thesis
dspace.entity.typePublication
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