Publication:

III/V nano ridge structures for optical applications on patterned 300mm silicon substrate

Date

2016
Journal article
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dc.contributor.authorKunert, Bernardette
dc.contributor.authorGuo, Weiming
dc.contributor.authorMols, Yves
dc.contributor.authorTian, Bin
dc.contributor.authorWang, Zhechao
dc.contributor.authorShi, Yuting
dc.contributor.authorVan Thourhout, Dries
dc.contributor.authorPantouvaki, Marianna
dc.contributor.authorVan Campenhout, Joris
dc.contributor.authorLanger, Robert
dc.contributor.authorBarla, Kathy
dc.contributor.imecauthorKunert, Bernardette
dc.contributor.imecauthorMols, Yves
dc.contributor.imecauthorShi, Yuting
dc.contributor.imecauthorVan Thourhout, Dries
dc.contributor.imecauthorPantouvaki, Marianna
dc.contributor.imecauthorVan Campenhout, Joris
dc.contributor.imecauthorLanger, Robert
dc.contributor.imecauthorBarla, Kathy
dc.contributor.orcidimecKunert, Bernardette::0000-0002-8986-4109
dc.contributor.orcidimecVan Thourhout, Dries::0000-0003-0111-431X
dc.contributor.orcidimecVan Campenhout, Joris::0000-0003-0778-2669
dc.contributor.orcidimecLanger, Robert::0000-0002-1132-3468
dc.date.accessioned2021-10-23T11:58:13Z
dc.date.available2021-10-23T11:58:13Z
dc.date.embargo9999-12-31
dc.date.issued2016
dc.identifier.issn0003-6951
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26862
dc.identifier.urlhttp://scitation.aip.org/content/aip/journal/apl/109/9/10.1063/1.4961936
dc.source.beginpage91101
dc.source.issue9
dc.source.journalApplied Physics Letters
dc.source.volume109
dc.title

III/V nano ridge structures for optical applications on patterned 300mm silicon substrate

dc.typeJournal article
dspace.entity.typePublication
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