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New breakdown mechanism investigation: barrier metal penetration induced soft breakdown in low-k dielectrics
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New breakdown mechanism investigation: barrier metal penetration induced soft breakdown in low-k dielectrics
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Date
2016
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Wu, Chen
;
Li, Yunlong
;
Boemmels, Juergen
;
De Wolf, Ingrid
;
Tokei, Zsolt
;
Croes, Kristof
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1805
since deposited on 2021-10-23
Acq. date: 2025-12-16
Citations
Metrics
Views
1805
since deposited on 2021-10-23
Acq. date: 2025-12-16
Citations