Publication:

Model for the emission of Si+ ions during oxygen bombardment of Si(100) surfaces

Date

1994
Journal article
Simple item page Full metadata Statistics
 
dc.contributor.authorAlay, Josep Lluis
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.accessioned2021-09-29T12:39:40Z
dc.date.available2021-09-29T12:39:40Z
dc.date.embargo9999-12-31
dc.date.issued1994
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11
dc.source.beginpage15015
dc.source.endpage15025
dc.source.journalPhysical Review B
dc.source.volume50
dc.title

Model for the emission of Si+ ions during oxygen bombardment of Si(100) surfaces

dc.typeJournal article
dspace.entity.typePublication
Files

Original bundle

Name:
3.pdf
Size:
1.77 MB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Articles