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Feasibility of detecting and imaging deeply buried voids using GHz Half Wavelength Contact Acoustic Microscopy

 
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cris.virtual.orcid0000-0002-7503-8922
cris.virtual.orcid0000-0002-6554-7205
cris.virtualsource.department9a3d60e7-3e8b-4366-b479-ea599b23d28b
cris.virtualsource.department3b854db4-1f5f-434c-bcb2-498e6b938dc9
cris.virtualsource.orcid9a3d60e7-3e8b-4366-b479-ea599b23d28b
cris.virtualsource.orcid3b854db4-1f5f-434c-bcb2-498e6b938dc9
dc.contributor.authorQuesson, Benoit A. J.
dc.contributor.authorvan Willigen, D. M.
dc.contributor.authorHorchens, L.
dc.contributor.authorGerritsmal, A. M.
dc.contributor.authorBogdanowicz, Janusz
dc.contributor.authorChen, Cong
dc.contributor.authorvan Neer, P. L. M. J.
dc.contributor.imecauthorBogdanowicz, J.
dc.contributor.imecauthorChen, C.
dc.date.accessioned2025-04-03T04:34:50Z
dc.date.available2025-04-03T04:34:50Z
dc.date.issued2024
dc.identifier.doi10.1109/UFFC-JS60046.2024.10793492
dc.identifier.eisbn979-8-3503-7190-1
dc.identifier.isbn979-8-3503-7191-8
dc.identifier.issn1099-4734
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/45479
dc.publisherIEEE
dc.source.conference2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium
dc.source.conferencedate2024-26-22
dc.source.conferencelocationTaipei
dc.source.numberofpages3
dc.title

Feasibility of detecting and imaging deeply buried voids using GHz Half Wavelength Contact Acoustic Microscopy

dc.typeProceedings paper
dspace.entity.typePublication
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