Publication:
Feasibility of detecting and imaging deeply buried voids using GHz Half Wavelength Contact Acoustic Microscopy
| dc.contributor.author | Quesson, Benoit A. J. | |
| dc.contributor.author | van Willigen, D. M. | |
| dc.contributor.author | Horchens, L. | |
| dc.contributor.author | Gerritsmal, A. M. | |
| dc.contributor.author | Bogdanowicz, Janusz | |
| dc.contributor.author | Chen, Cong | |
| dc.contributor.author | van Neer, P. L. M. J. | |
| dc.contributor.imecauthor | Bogdanowicz, J. | |
| dc.contributor.imecauthor | Chen, C. | |
| dc.date.accessioned | 2025-04-03T04:34:50Z | |
| dc.date.available | 2025-04-03T04:34:50Z | |
| dc.date.issued | 2024 | |
| dc.identifier.doi | 10.1109/UFFC-JS60046.2024.10793492 | |
| dc.identifier.eisbn | 979-8-3503-7190-1 | |
| dc.identifier.isbn | 979-8-3503-7191-8 | |
| dc.identifier.issn | 1099-4734 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/45479 | |
| dc.publisher | IEEE | |
| dc.source.conference | 2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium | |
| dc.source.conferencedate | 2024-26-22 | |
| dc.source.conferencelocation | Taipei | |
| dc.source.numberofpages | 3 | |
| dc.title | Feasibility of detecting and imaging deeply buried voids using GHz Half Wavelength Contact Acoustic Microscopy | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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