Publication:

Wafer-Scale Integration of Single Layer Graphene Electro-Absorption Modulators in a 300 mm CMOS Pilot Line

 
dc.contributor.authorWu, Cheng-Han
dc.contributor.authorBrems, Steven
dc.contributor.authorYudistira, Didit
dc.contributor.authorCott, Daire
dc.contributor.authorMilenin, Alexey
dc.contributor.authorVandersmissen, Kevin
dc.contributor.authorMaestre, Arantxa
dc.contributor.authorCenteno, Alba
dc.contributor.authorZurutuza, Amaia
dc.contributor.authorVan Campenhout, Joris
dc.contributor.authorHuyghebaert, Cedric
dc.contributor.authorVan Thourhout, Dries
dc.contributor.authorPantouvaki, Marianna
dc.contributor.imecauthorBrems, Steven
dc.contributor.imecauthorYudistira, Didit
dc.contributor.imecauthorCott, Daire
dc.contributor.imecauthorMilenin, Alexey
dc.contributor.imecauthorVandersmissen, Kevin
dc.contributor.imecauthorVan Campenhout, Joris
dc.contributor.imecauthorHuyghebaert, Cedric
dc.contributor.imecauthorVan Thourhout, Dries
dc.contributor.imecauthorPantouvaki, Marianna
dc.contributor.imecauthorWu, Cheng-Han
dc.contributor.orcidimecBrems, Steven::0000-0002-0282-8528
dc.contributor.orcidimecMilenin, Alexey::0000-0003-0747-0462
dc.contributor.orcidimecVan Campenhout, Joris::0000-0003-0778-2669
dc.contributor.orcidimecHuyghebaert, Cedric::0000-0001-6043-7130
dc.contributor.orcidimecVan Thourhout, Dries::0000-0003-0111-431X
dc.contributor.orcidimecYudistira, Didit::0000-0003-1440-5407
dc.contributor.orcidimecVandersmissen, Kevin::0009-0008-7831-564X
dc.date.accessioned2023-11-22T09:16:59Z
dc.date.available2023-04-22T04:04:27Z
dc.date.available2023-11-22T09:16:59Z
dc.date.issued2023
dc.description.wosFundingTextThe authors acknowledge funding from EU Horizon 2020 research and innovation program under grant agreement no. 881603 (Graphene flagship Core3) and from Imec's industry affiliation R&D program on Optical I/O. The authors thank H.C. Tsai and S. Sergeant for their assistance in Raman measurements.
dc.identifier.doi10.1002/lpor.202200789
dc.identifier.issn1863-8880
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/41474
dc.publisherWILEY-V C H VERLAG GMBH
dc.source.beginpageArt. 2200789
dc.source.endpagena
dc.source.issue6
dc.source.journalLASER & PHOTONICS REVIEWS
dc.source.numberofpages9
dc.source.volume17
dc.subject.keywordsDEPOSITION
dc.subject.keywordsPHOTONICS
dc.subject.keywordsPHOTODETECTOR
dc.subject.keywordsMONOLAYER
dc.subject.keywordsCRYSTALS
dc.subject.keywordsGROWTH
dc.subject.keywordsGUIDE
dc.title

Wafer-Scale Integration of Single Layer Graphene Electro-Absorption Modulators in a 300 mm CMOS Pilot Line

dc.typeJournal article
dspace.entity.typePublication
Files
Publication available in collections: