Publication:

Modeling and simulation of a MEMS thermal actuator with polysilicon heater

Date

2014

Proceedings Paper

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Files

30191.pdf 1.54 MB

Author(s)

Dellaert, Dries

;

Doutreloigne, Jan

Statistics

1873 since deposited on 2021-10-22

Acq. date: 2026-02-24