Publication:
Modeling and simulation of a MEMS thermal actuator with polysilicon heater
Date
Loading...
Files
Journal
Abstract
Description
Metrics
Views
1873 since deposited on 2021-10-22
2last month
Acq. date: 2025-12-16
Citations
Metrics
Views
1873 since deposited on 2021-10-22
2last month
Acq. date: 2025-12-16
Citations