Publication:

EUV based multi-patterning schemes for advanced DRAM nodes

Date

2022
Proceedings Paper
https://doi.org/10.1117/12.2615644
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Author(s)

Das, Sayantan  
;
Sah, Kaushik
;
Fallica, Roberto  
;
Chen, Zhijin
;
Halder, Sandip  
;
Cross, Andrew
;
De Simone, Danilo  
;
Treska, Fergo  
;
Leray, Philippe  
;
Kim, Ryan Ryoung han
;
Maguire, Ethan
;
Wei, Chih-, I
;
Fenger, Germain
;
Lafferty, Neal
;
Lee, Jeonghoon  

Journal

Proceedings of SPIE

Abstract

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1207 since deposited on 2022-09-08
Acq. date: 2025-10-26

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1207 since deposited on 2022-09-08
Acq. date: 2025-10-26

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