Publication:

EUV based multi-patterning schemes for advanced DRAM nodes

Date

2022

Proceedings Paper

https://doi.org/10.1117/12.2615644

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Author(s)

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Fallica, Roberto

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De Simone, Danilo

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Leray, Philippe

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Kim, Ryan Ryoung han

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Fenger, Germain

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Journal

Proceedings of SPIE

Statistics

1230 since deposited on 2022-09-08

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Acq. date: 2026-08-06