Publication:
The future of lithography
Date
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.orcid | 0000-0003-0803-4267 | |
| cris.virtualsource.department | 987ea135-86ab-40b5-a86e-f94391ccf5fe | |
| cris.virtualsource.orcid | 987ea135-86ab-40b5-a86e-f94391ccf5fe | |
| dc.contributor.author | Ronse, Kurt | |
| dc.contributor.imecauthor | Ronse, Kurt | |
| dc.contributor.orcidimec | Ronse, Kurt::0000-0003-0803-4267 | |
| dc.date.accessioned | 2021-10-19T18:15:40Z | |
| dc.date.available | 2021-10-19T18:15:40Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 2011 | |
| dc.identifier.issn | 0038-111X | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/19704 | |
| dc.identifier.url | http://www.electroiq.com/index/display/semiconductors-article-display/7921500372/articles/solid-state-technology/volume-54/issue | |
| dc.source.beginpage | 13 | |
| dc.source.endpage | 16 | |
| dc.source.issue | 2 | |
| dc.source.journal | Solid State Technology | |
| dc.source.volume | 54 | |
| dc.title | The future of lithography | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | Original bundle
| |
| Publication available in collections: |