Publication:

Characterization of advanced semiconductor materials by thermal desorption mass spectrometry with atmospheric pressure ionization

Date

2003
Proceedings Paper
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dc.contributor.authorCarbonell, Laure
dc.contributor.authorVereecke, Guy
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorCaymax, Matty
dc.contributor.authorVan Hove, Marleen
dc.contributor.authorMaex, Karen
dc.contributor.authorMertens, Paul
dc.contributor.imecauthorVereecke, Guy
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorMaex, Karen
dc.contributor.imecauthorMertens, Paul
dc.contributor.orcidimecVereecke, Guy::0000-0001-9058-9338
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.date.accessioned2021-10-15T04:05:35Z
dc.date.available2021-10-15T04:05:35Z
dc.date.embargo9999-12-31
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7276
dc.source.beginpage150
dc.source.conferenceIC Techniques for Semiconductor Materials, Devices, and Processes
dc.source.conferencedate28/04/2003
dc.source.conferencelocationParis France
dc.source.endpage159
dc.title

Characterization of advanced semiconductor materials by thermal desorption mass spectrometry with atmospheric pressure ionization

dc.typeProceedings paper
dspace.entity.typePublication
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