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Influence of block copolymer composition in grapho-epitaxy directed self-assembly for contact hole multiplication

Date

2016
Proceedings Paper
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dc.contributor.authorDoise, Jan
dc.contributor.authorChan, BT
dc.contributor.authorHori, Masafumi
dc.contributor.authorGronheid, Roel
dc.contributor.imecauthorDoise, Jan
dc.contributor.imecauthorChan, BT
dc.contributor.imecauthorGronheid, Roel
dc.contributor.orcidimecChan, BT::0000-0003-2890-0388
dc.date.accessioned2021-10-23T10:38:52Z
dc.date.available2021-10-23T10:38:52Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26569
dc.source.conference2nd International Symposium on DSA
dc.source.conferencedate11/10/2016
dc.source.conferencelocationGrenoble France
dc.title

Influence of block copolymer composition in grapho-epitaxy directed self-assembly for contact hole multiplication

dc.typeProceedings paper
dspace.entity.typePublication
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