Publication:

Growth and characterization of hexagonal boron nitride by unbalanced RF magnetron sputtering

Date

2010
Presentation
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dc.contributor.authorBenMoussa, B.
dc.contributor.authorD'Haen, Jan
dc.contributor.authorBorschel, C.
dc.contributor.authorGoris, L.
dc.contributor.authorSoltani, A.
dc.contributor.authorMortet, Vincent
dc.contributor.authorRonning, C.
dc.contributor.authorD'Olieslaeger, Marc
dc.contributor.authorBoyen, H.G.
dc.contributor.authorHaenen, Ken
dc.contributor.imecauthorD'Haen, Jan
dc.contributor.imecauthorD'Olieslaeger, Marc
dc.contributor.imecauthorHaenen, Ken
dc.contributor.orcidimecHaenen, Ken::0000-0001-6711-7367
dc.date.accessioned2021-10-18T15:20:16Z
dc.date.available2021-10-18T15:20:16Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16735
dc.source.conferenceHasselt Diamond Workshop - SBDD XV
dc.source.conferencedate22/02/2010
dc.source.conferencelocationHasselt Belgium
dc.title

Growth and characterization of hexagonal boron nitride by unbalanced RF magnetron sputtering

dc.typeOral presentation
dspace.entity.typePublication
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