Publication:
Fabrication of photonic crystals in silicon-on-insulator using 248-nm deep UV lithography
Date
| dc.contributor.author | Bogaerts, Wim | |
| dc.contributor.author | Wiaux, Vincent | |
| dc.contributor.author | Taillaert, Dirk | |
| dc.contributor.author | Beckx, Stephan | |
| dc.contributor.author | Luyssaert, Bert | |
| dc.contributor.author | Bienstman, P. | |
| dc.contributor.author | Baets, Roel | |
| dc.contributor.imecauthor | Bogaerts, Wim | |
| dc.contributor.imecauthor | Wiaux, Vincent | |
| dc.contributor.imecauthor | Beckx, Stephan | |
| dc.contributor.imecauthor | Baets, Roel | |
| dc.contributor.orcidimec | Bogaerts, Wim::0000-0003-1112-8950 | |
| dc.contributor.orcidimec | Baets, Roel::0000-0003-1266-1319 | |
| dc.date.accessioned | 2021-10-14T21:10:35Z | |
| dc.date.available | 2021-10-14T21:10:35Z | |
| dc.date.issued | 2002 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/6047 | |
| dc.source.beginpage | 928 | |
| dc.source.endpage | 934 | |
| dc.source.issue | 4 | |
| dc.source.journal | IEEE J. Selected Topics in Quantum Electronics | |
| dc.source.volume | 8 | |
| dc.title | Fabrication of photonic crystals in silicon-on-insulator using 248-nm deep UV lithography | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
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