Publication:

ToF-SIMS and G-SIMS analyses of organic thin films for microelectronic applications

Date

2011
Meeting abstract
Simple item page Full metadata Statistics
 
dc.contributor.authorFranquet, Alexis
dc.contributor.authorConard, Thierry
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.date.accessioned2021-10-19T13:37:26Z
dc.date.available2021-10-19T13:37:26Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18930
dc.source.conference15th International Conference on Thin Films - ICTF
dc.source.conferencedate8/11/2011
dc.source.conferencelocationKyoto Japan
dc.title

ToF-SIMS and G-SIMS analyses of organic thin films for microelectronic applications

dc.typeMeeting abstract
dspace.entity.typePublication
Files
Publication available in collections:
Conference contributions