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Correlation between stress-induced leakage current (SILC) and the HfO2 bulk trap density in a SiO2/HfO2 stack

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2016 since deposited on 2021-10-15
3last month
Acq. date: 2025-12-08

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2016 since deposited on 2021-10-15
3last month
Acq. date: 2025-12-08

Citations