Thermal infrared detection using linear arrays of poly SiGe uncooled microbolometers

dc.contributor.author	De Moor, Piet
dc.contributor.author	Creten, Ybe
dc.contributor.author	Goessens, Claus
dc.contributor.author	Leonov, Vladimir
dc.contributor.author	Vermeiren, Jan
dc.contributor.author	Van Hoof, Chris
dc.contributor.imecauthor	De Moor, Piet
dc.contributor.imecauthor	Leonov, Vladimir
dc.contributor.imecauthor	Van Hoof, Chris
dc.contributor.orcidimec	Leonov, Vladimir::0000-0002-4364-8945
dc.date.accessioned	2021-10-15T04:22:25Z
dc.date.available	2021-10-15T04:22:25Z
dc.date.issued	2003
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/7439
dc.source.beginpage	140
dc.source.conference	Proceedings ICM - 15th International Conference on Microelectronics
dc.source.conferencedate	9/12/2003
dc.source.conferencelocation	Cairo Egypt
dc.source.endpage	142
dc.title	Thermal infrared detection using linear arrays of poly SiGe uncooled microbolometers
dc.type	Proceedings paper
dspace.entity.type	Publication
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