Publication:
Reliability of thin ZrO2 gate dielectric layers
Date
| dc.contributor.author | O'Connor, Robert | |
| dc.contributor.author | Hughes, Greg | |
| dc.contributor.author | Kauerauf, Thomas | |
| dc.contributor.author | Ragnarsson, Lars-Ake | |
| dc.contributor.imecauthor | Ragnarsson, Lars-Ake | |
| dc.contributor.orcidimec | Ragnarsson, Lars-Ake::0000-0003-1057-8140 | |
| dc.date.accessioned | 2021-10-19T16:49:09Z | |
| dc.date.available | 2021-10-19T16:49:09Z | |
| dc.date.issued | 2011 | |
| dc.identifier.issn | 0026-2714 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/19499 | |
| dc.source.beginpage | 1118 | |
| dc.source.endpage | 1122 | |
| dc.source.issue | 6 | |
| dc.source.journal | Microelectronics Reliability | |
| dc.source.volume | 51 | |
| dc.title | Reliability of thin ZrO2 gate dielectric layers | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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