Publication:
In-situ scanning electron microscopy study of fracture events during BEOL microbeam bending tests
Date
| dc.contributor.author | Vanstreels, Kris | |
| dc.contributor.author | De Wolf, Ingrid | |
| dc.contributor.author | Zahedmanesh, Houman | |
| dc.contributor.author | Bender, Hugo | |
| dc.contributor.author | Gonzalez, Mario | |
| dc.contributor.author | Lefebvre, J. | |
| dc.contributor.author | Bhowmick, S. | |
| dc.contributor.imecauthor | Vanstreels, Kris | |
| dc.contributor.imecauthor | De Wolf, Ingrid | |
| dc.contributor.imecauthor | Zahedmanesh, Houman | |
| dc.contributor.imecauthor | Bender, Hugo | |
| dc.contributor.imecauthor | Gonzalez, Mario | |
| dc.contributor.orcidimec | Vanstreels, Kris::0000-0002-4420-0966 | |
| dc.contributor.orcidimec | De Wolf, Ingrid::0000-0003-3822-5953 | |
| dc.date.accessioned | 2021-10-22T07:39:04Z | |
| dc.date.available | 2021-10-22T07:39:04Z | |
| dc.date.issued | 2014 | |
| dc.identifier.issn | 0003-6951 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/24747 | |
| dc.identifier.url | http://dx.doi.org/10.1063/1.4902516 | |
| dc.source.beginpage | 213102 | |
| dc.source.issue | 21 | |
| dc.source.journal | Applied Physics Letters | |
| dc.source.volume | 105 | |
| dc.title | In-situ scanning electron microscopy study of fracture events during BEOL microbeam bending tests | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
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