Publication:

Influence of nonlinear intermolecular forces on the harmonic behavior of NEM resonators

Date

2013
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorZanaty, Mohamed
dc.contributor.authorJansen, Roelof
dc.contributor.authorRochus, Veronique
dc.contributor.authorAbbas, M.
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorTilmans, Harrie
dc.contributor.authorRottenberg, Xavier
dc.contributor.imecauthorJansen, Roelof
dc.contributor.imecauthorRochus, Veronique
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.orcidimecJansen, Roelof::0000-0001-6685-4699
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.date.accessioned2021-10-21T14:56:44Z
dc.date.available2021-10-21T14:56:44Z
dc.date.embargo9999-12-31
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23430
dc.source.conferenceIEEE Int. Conf on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsyst. - EuroSimE
dc.source.conferencedate15/04/2013
dc.source.conferencelocationWroclaw Poland
dc.title

Influence of nonlinear intermolecular forces on the harmonic behavior of NEM resonators

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
26926.pdf
Size:
402.93 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions