Publication:
RF-MEMS metal contact capacitive switches
Date
| dc.contributor.author | Rottenberg, Xavier | |
| dc.contributor.author | Nauwelaers, Bart | |
| dc.contributor.author | Mertens, Robert | |
| dc.contributor.author | Deborgies, F. | |
| dc.contributor.author | Marchand, L. | |
| dc.contributor.author | De Raedt, Walter | |
| dc.contributor.author | Tilmans, Harrie | |
| dc.contributor.imecauthor | Rottenberg, Xavier | |
| dc.contributor.imecauthor | Nauwelaers, Bart | |
| dc.contributor.imecauthor | Mertens, Robert | |
| dc.contributor.imecauthor | De Raedt, Walter | |
| dc.contributor.imecauthor | Tilmans, Harrie | |
| dc.contributor.orcidimec | De Raedt, Walter::0000-0002-7117-7976 | |
| dc.contributor.orcidimec | Tilmans, Harrie::0000-0003-4240-4962 | |
| dc.date.accessioned | 2021-10-15T06:28:00Z | |
| dc.date.available | 2021-10-15T06:28:00Z | |
| dc.date.issued | 2003 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/8093 | |
| dc.source.beginpage | 19 | |
| dc.source.conference | Abstract Book and Programme 4th Round Table on Micro/Nano Technologies for Space | |
| dc.source.conferencedate | 20/05/2003 | |
| dc.source.conferencelocation | Noordwijk The Netherlands | |
| dc.title | RF-MEMS metal contact capacitive switches | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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