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Area-selective atomic layer deposition of TiN, TiO2, and HfO2 on Si3N4 in Sub-50 nanometer Si3N4/amorphous carbon structures
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1955 since deposited on 2021-10-26
Acq. date: 2025-12-15
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Metrics
Views
1955 since deposited on 2021-10-26
Acq. date: 2025-12-15
Citations