Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Articles
A high-throughput silicon microphysiometer
Publication:
A high-throughput silicon microphysiometer
Copy permalink
Date
2000
Journal article
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
4916.pdf
866.08 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Verhaegen, Katarina
;
Baert, Kris
;
Simaels, J.
;
van Driessche, W.
Journal
Sensors and Actuators A
Abstract
Description
Metrics
Views
1883
since deposited on 2021-10-14
1
last month
Acq. date: 2025-12-11
Citations
Metrics
Views
1883
since deposited on 2021-10-14
1
last month
Acq. date: 2025-12-11
Citations