Publication:

How clean is clean enough?

Date

1995
Proceedings Paper
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cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.orcid0000-0001-7116-7498
cris.virtualsource.departmente97c04b9-4d2d-4488-b89a-1fbc84127a87
cris.virtualsource.orcide97c04b9-4d2d-4488-b89a-1fbc84127a87
dc.contributor.authorMertens, Paul
dc.contributor.authorTeerlinck, Ivo
dc.contributor.authorHurd, Trace
dc.contributor.authorKenis, Karine
dc.contributor.authorSchmidt, Harald
dc.contributor.authorRotondaro, Antonio
dc.contributor.authorHall, L.
dc.contributor.authorGräf, D.
dc.contributor.authorDe Pestel, Freddy
dc.contributor.authorMeuris, Marc
dc.contributor.authorHeyns, Marc
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorKenis, Karine
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.date.accessioned2021-09-29T13:10:57Z
dc.date.available2021-09-29T13:10:57Z
dc.date.embargo9999-12-31
dc.date.issued1995
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/759
dc.source.beginpage7
dc.source.conferenceProceedings of SEMICON/West 1995 Technical Seminar: Cleaning Technology for the Submicron Era
dc.source.conferencedate11/07/1995
dc.source.conferencelocationSan Francisco, CA USA
dc.title

How clean is clean enough?

dc.typeProceedings paper
dspace.entity.typePublication
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