Publication:

Testing the limits of TaN barrier scaling

Date

2018
Meeting abstract
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dc.contributor.authorWitt, Christian
dc.contributor.authorYeap, K.B.
dc.contributor.authorLesniewska, Alicja
dc.contributor.authorWan, Danny
dc.contributor.authorJourdan, Nicolas
dc.contributor.authorCiofi, Ivan
dc.contributor.authorWu, Chen
dc.contributor.authorTokei, Zsolt
dc.contributor.imecauthorWitt, Christian
dc.contributor.imecauthorLesniewska, Alicja
dc.contributor.imecauthorWan, Danny
dc.contributor.imecauthorJourdan, Nicolas
dc.contributor.imecauthorCiofi, Ivan
dc.contributor.imecauthorWu, Chen
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecLesniewska, Alicja::0000-0003-3863-065X
dc.contributor.orcidimecWan, Danny::0000-0003-4847-3184
dc.contributor.orcidimecCiofi, Ivan::0000-0003-1374-4116
dc.contributor.orcidimecWu, Chen::0000-0002-4636-8842
dc.date.accessioned2021-10-26T09:31:57Z
dc.date.available2021-10-26T09:31:57Z
dc.date.embargo9999-12-31
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/32277
dc.identifier.urlhttps://ieeexplore.ieee.org/document/8430289/
dc.source.beginpage54
dc.source.conferenceIEEE International Interconnect Technology Conference - IITC
dc.source.conferencedate4/06/2018
dc.source.conferencelocationSanta Clara, CA USA
dc.source.endpage56
dc.title

Testing the limits of TaN barrier scaling

dc.typeMeeting abstract
dspace.entity.typePublication
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