Publication:
Strength-porosity relationship of nanoporous MSSQ films characterized by Brillouin light scattering and surface acoustic wave spectrosopy
Date
| dc.contributor.author | Flannery, C.M. | |
| dc.contributor.author | Wittkowski, T. | |
| dc.contributor.author | Jung, K. | |
| dc.contributor.author | Hillebrands, B. | |
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.date.accessioned | 2021-10-14T21:38:01Z | |
| dc.date.available | 2021-10-14T21:38:01Z | |
| dc.date.issued | 2002 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/6327 | |
| dc.source.beginpage | 343 | |
| dc.source.conference | Silicon Materials - Processing, Characterization, and Reliability | |
| dc.source.conferencedate | 1/04/2002 | |
| dc.source.conferencelocation | San Francisco, CA USA | |
| dc.source.endpage | 354 | |
| dc.title | Strength-porosity relationship of nanoporous MSSQ films characterized by Brillouin light scattering and surface acoustic wave spectrosopy | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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