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The influence of geometrical non-idealities in surface micro fabricated MEMS test structures on the extracted Young's modulus using analytical expressions assuming ideal boundary conditions

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1818 since deposited on 2021-10-16
1last month
Acq. date: 2026-08-08

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1818 since deposited on 2021-10-16
1last month
Acq. date: 2026-08-08

Citations