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The influence of geometrical non-idealities in surface micro fabricated MEMS test structures on the extracted Young's modulus using analytical expressions assuming ideal boundary conditions
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The influence of geometrical non-idealities in surface micro fabricated MEMS test structures on the extracted Young's modulus using analytical expressions assuming ideal boundary conditions
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Date
2007
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Van Barel, Greg
;
Witvrouw, Ann
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Abstract
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1815
since deposited on 2021-10-16
Acq. date: 2025-12-15
Citations
Metrics
Views
1815
since deposited on 2021-10-16
Acq. date: 2025-12-15
Citations