Publication:
Failure mechanisms in MEMS/NEMS devices
Date
| dc.contributor.author | van Spengen, Merlijn | |
| dc.contributor.author | Modlinski, Robert | |
| dc.contributor.author | Puers, Robert | |
| dc.contributor.author | Jourdain, Anne | |
| dc.contributor.imecauthor | Jourdain, Anne | |
| dc.date.accessioned | 2021-10-16T20:55:11Z | |
| dc.date.available | 2021-10-16T20:55:11Z | |
| dc.date.issued | 2007-10 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/13098 | |
| dc.source.beginpage | 1663 | |
| dc.source.book | Springer Handbook of Nanotechnology, 2nd edition | |
| dc.source.endpage | 1684 | |
| dc.title | Failure mechanisms in MEMS/NEMS devices | |
| dc.type | Book chapter | |
| dspace.entity.type | Publication | |
| Files | ||
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