Publication:

Planar Langmuir probe in pulsing regime

Date

2011-05
Meeting abstract
Simple item page Full metadata Statistics
 
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.orcid0000-0001-5178-6670
cris.virtual.orcid0000-0001-7614-2097
cris.virtualsource.departmentbce8c338-4d24-430a-a452-479a72e43639
cris.virtualsource.department9d0d6dfb-64f8-418f-9030-93da69a0078c
cris.virtualsource.orcidbce8c338-4d24-430a-a452-479a72e43639
cris.virtualsource.orcid9d0d6dfb-64f8-418f-9030-93da69a0078c
dc.contributor.authorSamara, Vladimir
dc.contributor.authorBooth, Jean-Paul
dc.contributor.authorde Marneffe, Jean-Francois
dc.contributor.authorBoullart, Werner
dc.contributor.imecauthorde Marneffe, Jean-Francois
dc.contributor.imecauthorBoullart, Werner
dc.contributor.orcidimecBoullart, Werner::0000-0001-7614-2097
dc.date.accessioned2021-10-19T18:22:48Z
dc.date.available2021-10-19T18:22:48Z
dc.date.embargo9999-12-31
dc.date.issued2011-05
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19721
dc.identifier.urlhttp://www.pesm2011.be/Pesm2011/online_presentations_5may.html
dc.source.conference4th International Workshop on Plasma Etch and Strip in Microelectronics - PESM
dc.source.conferencedate5/05/2011
dc.source.conferencelocationMechelen Belgium
dc.title

Planar Langmuir probe in pulsing regime

dc.typeMeeting abstract
dspace.entity.typePublication
Files

Original bundle

Name:
22800.pdf
Size:
71.8 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions