Publication:

Fabrication challenges in integrating self-assembled block copolymer process in semiconductor devices

Date

2020

Proceedings Paper

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Author(s)

Seema Saseendran, Sandeep

;

Paneri, Abhilash

;

;

Kutrzeba Kotowska, Bogumila

;

;

Jamieson, Geraldine

;

Paraschiv, Vasile

;

;

;

Sabuncuoglu Tezcan, Deniz

;

Takahashi, Kohei

;

Fujikane, Masaki

;

Himeno, Atsushi

;

Nakamura, Kunihiko

;

;

;

Tanaka, Hiroyuki

;

Naito, Yasuyuki

Statistics

2051 since deposited on 2021-10-29

Acq. date: 2026-05-17