Publication:
Structural characterization of mesoporous organosilica films for ultralow-k dielectrics
Date
| dc.contributor.author | de Theije, F.K. | |
| dc.contributor.author | Balkenende, A.R. | |
| dc.contributor.author | Verheyen, M.A. | |
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.contributor.author | Moguilnikov, Konstantin | |
| dc.contributor.author | Furukawa, Y. | |
| dc.date.accessioned | 2021-10-15T04:23:39Z | |
| dc.date.available | 2021-10-15T04:23:39Z | |
| dc.date.issued | 2003 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/7449 | |
| dc.source.beginpage | 4280 | |
| dc.source.endpage | 4289 | |
| dc.source.issue | 18 | |
| dc.source.journal | Journal of Physical Chemistry B | |
| dc.source.volume | 107 | |
| dc.title | Structural characterization of mesoporous organosilica films for ultralow-k dielectrics | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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