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Fabrication of strained Si NMOS transistors on thin buffer layers with selective and non-selective epitaxial growth techniques
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Fabrication of strained Si NMOS transistors on thin buffer layers with selective and non-selective epitaxial growth techniques
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Date
2004
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Eneman, Geert
;
Verheyen, Peter
;
Rooyackers, Rita
;
Delhougne, Romain
;
Loo, Roger
;
Caymax, Matty
;
Meunier-Beillard, Philippe
;
De Meyer, Kristin
;
Vandervorst, Wilfried
Journal
Materials Science in Semiconductor Processing
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1913
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Acq. date: 2025-12-10
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Views
1913
since deposited on 2021-10-15
1
last month
Acq. date: 2025-12-10
Citations