Publication:

Physical design and mask synthesis considerations for DPT

Date

2008
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorLucas, Kevin
dc.contributor.authorCork, Chris
dc.contributor.authorHapli, John
dc.contributor.authorMiloslavsky, Alex
dc.contributor.authorWiaux, Vincent
dc.contributor.authorVerhaegen, Staf
dc.contributor.imecauthorWiaux, Vincent
dc.date.accessioned2021-10-17T08:34:02Z
dc.date.available2021-10-17T08:34:02Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14072
dc.source.conferenceSEMATECH Litho Forum
dc.source.conferencedate13/05/2008
dc.source.conferencelocationBolton Landing, NY USA
dc.title

Physical design and mask synthesis considerations for DPT

dc.typeProceedings paper
dspace.entity.typePublication
Files
Publication available in collections:
Conference contributions