Publication:

EUV dose reduction for pitch 28 nm line-space

Date

2024

Proceedings Paper

https://doi.org/10.1117/12.3034646

Simple item page Full metadata Statistics

Author(s)

;

Verstraete, Lander

;

Franke, Joern-Holger

;

Kundu, Achintya

;

Fallica, Roberto

;

;

Gallagher, Emily

;

De Simone, Danilo

;

Philipsen, Vicky

;

Journal

Proceedings of SPIE

Metrics

115 since deposited on 2025-05-11

Acq. date: 2025-12-10