Publication:
Metrology for nano-electronics: challenges and solutions
Date
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.date.accessioned | 2021-10-18T04:24:42Z | |
| dc.date.available | 2021-10-18T04:24:42Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 2009 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/16423 | |
| dc.source.beginpage | 1956 | |
| dc.source.conference | 216th ECS Meeting | |
| dc.source.conferencedate | 4/10/2009 | |
| dc.source.conferencelocation | Vienna Oostenrijk | |
| dc.title | Metrology for nano-electronics: challenges and solutions | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | Original bundle
| |
| Publication available in collections: |